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Order Code, Price (EUR/GBP) Probes per set
MSS_FMR_13-5 5 pcs
€ 1095.00 £ 953.00 add to shopping cart
MSS_FMR_13-25 25 pcs
€ 4900.00 £ 4263.00 add to shopping cart

Product Availability: 5 - 7 working days


esd kit

DANGER: One tiny amount of static electricity while you are handling these probes will destroy the tip!

We highly recommend that you utilize an ESD station and if you do not already have one, we have a mobile ESD station for only £61 (70 EUR).
Considering the costs of these probes, this is a very wise investment.

Click here to order: ESD Kit

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AFM Probe type:

MSS_FMR_13

Manufacturer: NanoTools
Product Description:

Metrology Probe MSS SuperSharp PatternedMedia

Tilt compensated. Supersharp, high aspect ratio probe for very fine features such as patterned media. Soft tapping mode cantilever.

Multipurpose high resolution probe with excellent lifetime and reliability. The nanotools® MSS_FMR_13 tip is designed for non-contact, soft tapping/force modulation microscopy. It delivers outstanding resolution in critical AFM applications even on hard, tip eating samples like HDD, ceramics, silicon oxide/nitride, polysilicon to name a few.

The high aspect ratio part of the probe is made from HIGH-DENSITY, DIAMOND LIKE CARBON (HDC/DLC), thus offering the extreme durability of diamond together with high resolution imaging capability. The stiffness/Youngs modulus is 8 x of that of silicon. Applying our patented EBD (electron beam deposition) technique we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.

A 100 % quality check by SEM for every tip, high scan speeds, flexibility in combination with stiffness, 13 deg tilt compensation and optimized cost per scan are key parameters.

- EBD tip on pointprobe FMR/FESPA AFM cantilever

- tilt compensation: 13 deg +/-1 deg

- length of the high aspect ratio spike: 300 nm

- diameter at 300 nm tip length: 30 nm (1:10 aspect ratio)

- tip shape: conical, rotation-symmetric

- excellent tip radius: < 3 nm, typically 2 nm

- 100 % SEM check; good tip guarantee.

- high mechanical Q-factor for high sensitivity.

- fits into automated AFM tools (in fab/in line)


This product features alignment grooves on the backside of the holder chip.

Application Modes:
AFM Probe Specifications:
AFM Tips:
cant. shape tip height tip set back tip radius full cone angle half cone angle
EBD 0.4 µm (0.3 - 0.5 µm)* 0.3 - 0.5 µm* 0 (0 - 0 )* < 2 (< 5 guaranteed) < 3° at 300 nm from apex

AFM Cantilever(s):
cant. shape length width thickness force const. res. freq. probe base
beam 225 µm (215 - 235 µm)* 28 µm (20 - 35 µm)* 3 µm (2 - 4 µm)* 2.8 N/m (0.5 - 9.5 N/m)* 75 kHz (45 - 115 kHz)*

* typical range

Coating:
Aluminum reflective coating on the detector side of the cantilever. The Al reflective coating increases the laser signal by a factor of about 2.5. In particular it is recommended for highly reflective samples and machine vision applications.
Probes Datasheets:
Included.
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